Burger et al., 1994 - Google Patents
Characterization of microoptical elements by a stand-alone atomic-force microscopeBurger et al., 1994
- Document ID
- 10379760705628871364
- Author
- Burger J
- Randall N
- Christoph R
- Yan L
- Parriaux O
- Publication year
- Publication venue
- Nanofabrication Technologies and Device Integration
External Links
Snippet
The microfabrication of optical and micromechanical elements requires a high degree of accuracy in order to obtain the required efficiency in the functionality of the element. An easy, nondestructive 3D characterization of the batch fabricated elements after each …
- 238000010192 crystallographic characterization 0 title abstract description 9
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2008083059A (en) | Measuring system and measuring device for wafer | |
| US7321433B2 (en) | Method and apparatus for optically measuring the topography of nearly planar periodic structures | |
| US5905573A (en) | Near field optical probe for critical dimension measurements | |
| US11187518B2 (en) | Method and apparatus for super-resolution optical metrology | |
| Garnaes et al. | Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy | |
| WO2004112050A1 (en) | Integrated optical displacement sensors for scanning probe microscopy | |
| US5992225A (en) | Cantilever probe and scanning type probe microscope utilizing the cantilever probe | |
| Vander Rhodes et al. | Measurement of internal spatial modes and local propagation properties in optical waveguides | |
| Burger et al. | Characterization of microoptical elements by a stand-alone atomic-force microscope | |
| Danzebrink et al. | Near‐field optoelectronic detector probes based on standard scanning force cantilevers | |
| Ruf et al. | Integrated Fabry–Perot distance control for atomic force microscopy | |
| Spajer et al. | The reflection near field optical microscope: an alternative to STOM | |
| Barillaro et al. | Optical Quality-Assessment of High-Order One-Dimensional Silicon Photonic Crystals With a Reflectivity Notch at $\lambda\sim 1.55\\mu\hbox {m} $ | |
| KR101120527B1 (en) | Interferometer System using Point Source and Measurement Method thereof | |
| Bruyant et al. | Local complex reflectivity in optical waveguides | |
| JP2900552B2 (en) | Micro force detector | |
| Asundi et al. | Micro-moire methods: optical and scanning techniques | |
| Krajewski et al. | Design, modeling, and prototyping of microinterferometric tomography system for optical fiber inspection | |
| Borgonjen et al. | Probing field distributions on waveguide structures with an atomic force/photon scanning tunneling microscope | |
| Kempen et al. | Micromolded structures for integrated optical sensors | |
| WO2000003302A1 (en) | Low-cost, simple mass production of light-guiding tips | |
| Lee et al. | Imaging with blazed-binary diffractive elements | |
| Galeotti | Nano-opto-mechanical sensors for semiconductor metrology | |
| Nesci et al. | Optical near-field phase singularities produced by microstructures | |
| Göring | Advanced Atomic Force Microscopy: 3D Printed Micro-Optomechanical Sensor Systems |