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Tsaur, 1987 - Google Patents

Zone-melting-recrystallization Silicon-on-Insulator technology

Tsaur, 1987

Document ID
10167425079513772073
Author
Tsaur B
Publication year
Publication venue
IEEE Circuits and Devices Magazine

External Links

Snippet

The author describes the zone-melting recrystallization (ZMR) technique and the crystallographic properties of silicon-on-insulator (SOI) films. He reviews the devices and circuits fabricated in these films, discusses their radiation hardness, and considers the …
Continue reading at ieeexplore.ieee.org (other versions)

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