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Chou et al., 2016 - Google Patents

Investigation of mechanics properties of an awl-shaped serpentine microspring for in-plane displacement with low spring constant-to-layout area

Chou et al., 2016

Document ID
10088159514959717131
Author
Chou H
Lin M
Chen R
Publication year
Publication venue
Journal of Micro/Nanolithography, MEMS, and MOEMS

External Links

Snippet

The design, fabrication, and experimental test of an awl-shaped serpentine microspring (ASSM) for providing in-plane motion and low spring constant-to-layout area are investigated. The ASSM can provide low stiffness for in-plane motion under a restricted …
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