Nothing Special   »   [go: up one dir, main page]

Shields et al., 2001 - Google Patents

Spray pyrolysis of epitaxial YBCO films on (100) single crystal SrTiO3 substrates

Shields et al., 2001

Document ID
9976755535368316977
Author
Shields T
Kawano K
Button T
Abell J
Publication year
Publication venue
Superconductor Science and Technology

External Links

Snippet

Biaxially textured films of YBa 2 Cu 3 O 7−∂ have been deposited in situ on (100) single crystal SrTiO 3 substrates by a one step spray pyrolysis process. Good out-of-plane (FWHM= 0.4) and in-plane (FWHM= 8) textures have been achieved for films grown at temperatures …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2454—Processes for depositing or forming superconductor layers characterised by the substrate
    • H01L39/2461—Intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2454—Processes for depositing or forming superconductor layers characterised by the substrate
    • H01L39/2458—Monocrystalline substrates, e.g. epitaxial growth
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2425—Processes for depositing or forming superconductor layers from a solution
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2451—Precursor deposition followed by after-treatment, e.g. oxidation
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2464—After-treatment, e.g. patterning
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/02—Details
    • H01L39/12—Details characterised by the material
    • H01L39/125—Ceramic materials
    • H01L39/126—Ceramic materials comprising copper oxide
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/22—Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
    • H01L39/223—Josephson-effect devices
    • H01L39/225—Josephson-effect devices comprising high Tc ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof

Similar Documents

Publication Publication Date Title
Goyal et al. The RABiTS approach: Using rolling-assisted biaxially textured substrates for high-performance YBCO superconductors
US6159610A (en) Buffer layers on metal surfaces having biaxial texture as superconductor substrates
US6150034A (en) Buffer layers on rolled nickel or copper as superconductor substrates
Jergel Synthesis of high-Tc superconducting films by deposition from an aerosol
Aytug et al. La 0.7 Sr 0.3 MnO 3: A single, conductive-oxide buffer layer for the development of YBa 2 Cu 3 O 7− δ coated conductors
US20110034336A1 (en) CRITICAL CURRENT DENSITY ENHANCEMENT VIA INCORPORATION OF NANOSCALE Ba2(Y,RE)NbO6 IN REBCO FILMS
Akin et al. Textured growth of multi-layered buffer layers on Ni tape by sol-gel process
US6794339B2 (en) Synthesis of YBa2CU3O7 using sub-atmospheric processing
Araki et al. Growth model and the effect of CuO nanocrystallites on the properties of chemically derived epitaxial thin films of YBa 2 Cu 3 O 7− x
US20110034338A1 (en) CRITICAL CURRENT DENSITY ENHANCEMENT VIA INCORPORATION OF NANOSCALE Ba2(Y,RE)TaO6 IN REBCO FILMS
Shields et al. Spray pyrolysis of epitaxial YBCO films on (100) single crystal SrTiO3 substrates
JP2003300726A (en) Tape-like oxide superconductor and manufacturing method therefor
Paranthaman et al. Improved YBCO coated conductors using alternate buffer architectures
Akin et al. Textured CeO/sub 2/thin films on nickel tape by sol-gel process
Tsukada et al. Preparation of epitaxial YBa2Cu3O7− y films on CeO2-buffered yttria-stabilized zirconia substrates by fluorine-free metalorganic deposition
Sathyamurthy et al. Chemical solution deposition of highly oriented strontium titanate buffer layers for coated conductors
Van Driessche et al. Review of the application of high temperature superconductors in coated conductor development and the measurement of their properties
Celik et al. Nb-doped SrTiO3 buffer layers on LaAlO3 substrates by metalorganic deposition for YBCO superconducting films
Nakaoka et al. Effect of solution composition on superconducting properties of YBCO derived from TFA-MOD process
Chen et al. Growth of biaxially textured CeO2/YSZ/CeO2 and SrTiO3 buffer layers on textured Ni substrates by pulsed laser deposition
Shoup et al. Low-cost combustion chemical vapor deposition of epitaxial buffer layers and superconductors
Venkataraman et al. Growth of lanthanum manganate buffer layers for coated conductors via a metal-organic decomposition process
Chirayil et al. Epitaxial growth of Yb 2 O 3 buffer layers on biaxially textured-Ni (100) substrates by sol-gel process
Sathyamurthy et al. Fabrication of Y123 coated conductors using metal organic decomposition process
Carlson et al. LaNiO3 buffer layers for high critical current density YBa2Cu3O7− δ and Tl2Ba2CaCu2O8− δ films