Lépinay et al., 2015 - Google Patents
Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry dataLépinay et al., 2015
View PDF- Document ID
- 9302338682788532875
- Author
- Lépinay M
- Broussous L
- Licitra C
- Bertin F
- Rouessac V
- Ayral A
- Coasne B
- Publication year
- Publication venue
- Microporous and Mesoporous Materials
External Links
Snippet
Ellipsometric porosimetry (EP) experiments are performed to obtain the adsorption isotherms of water, methanol, and toluene on pristine and damaged SiOCH porous materials. The use of gaseous adsorbates with different polarities, sizes, and surface …
- 238000001187 ellipsometric porosimetry 0 title abstract description 36
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
- G01N15/088—Investigating volume, surface area, size or distribution of pores; Porosimetry
- G01N15/0893—Investigating volume, surface area, size or distribution of pores; Porosimetry by measuring weight or volume of sorbed fluid, e.g. B.E.T. method
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