Nothing Special   »   [go: up one dir, main page]

Minh et al., 2003 - Google Patents

Selective growth of carbon nanotubes on Si microfabricated tips and application for electron field emitters

Minh et al., 2003

Document ID
9279106804373919235
Author
Minh P
Tuyen L
Ono T
Miyashita H
Suzuki Y
Mimura H
Esashi M
Publication year
Publication venue
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

External Links

Snippet

In this article, we present the results on the synthesis and electron emission characteristics of an individual and a carbon nanotube (CNT) bundle on a Si tip. The Si tip with diameter of about 20 nm at the apex and the tip height of 5 μm was fabricated using Si microfabrication …
Continue reading at pubs.aip.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted to the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps

Similar Documents

Publication Publication Date Title
Bonard et al. Carbon nanotube films as electron field emitters
Oh et al. Liquid-phase fabrication of patterned carbon nanotube field emission cathodes
US6057637A (en) Field emission electron source
Gao et al. Field emission of large-area and graphitized carbon nanotube array on anodic aluminum oxide template
US20070103048A1 (en) Method for fabricating carbon nanotube-based field emission device
Lim et al. Effect of gas exposure on field emission properties of carbon nanotube arrays
Matsumoto et al. Ultralow biased field emitter using single-wall carbon nanotube directly grown onto silicon tip by thermal chemical vapor deposition
JP2002179418A (en) Method for forming carbon nanotube
Darbari et al. High electron emission from branched tree-like carbon nanotubes suitable for field emission applications
Chen et al. Ultrahigh-current field emission from sandwich-grown well-aligned uniform multi-walled carbon nanotube arrays with high adherence strength
US20080287030A1 (en) Method of fabricating carbide and nitride nano electron emitters
Minh et al. Selective growth of carbon nanotubes on Si microfabricated tips and application for electron field emitters
JP4029289B2 (en) Manufacturing method of conductive needle and conductive needle manufactured by the method
Lim et al. Field emission and application of carbon nanotubes
Smith et al. Electron field emission from room temperature grown carbon nanofibers
Wang et al. Field emission characteristics of lanthanum hexaboride coated silicon field emitters
Umnov et al. Giant field amplification in tungsten nanowires
Xavier et al. Stable field emission from arrays of vertically aligned free-standing metallic nanowires
JP2001035361A5 (en)
Kurachi et al. Uniform carbon‐nanotube emitter for field‐emission displays
Uh et al. Carbon nanotubes growing on rapid thermal annealed Ni and their application to a triode-type field emission device
Lee et al. Hot-filament CVD synthesis and application of carbon nanostructures
Minh et al. Carbon nanotube on a Si tip for electron field emitter
RU2813858C1 (en) Method of increasing efficiency of multi-tip electron field emission cathodes
Chen et al. Fabrication and characterization of carbon nanotube arrays using sandwich catalyst stacks