Kim et al., 2007 - Google Patents
Multiaxis maglev positioner with nanometer resolution over extended travel rangeKim et al., 2007
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- 8906023044437242149
- Author
- Kim W
- Verma S
- Publication year
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This paper presents a novel multiaxis positioner that operates on the magnetic-levitation (maglev) principle. This maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was …
- 230000005291 magnetic 0 abstract description 19
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