Tormen et al., 2007 - Google Patents
Novel fabrication method for three-dimensional nanostructuring: an application to micro-opticsTormen et al., 2007
View PDF- Document ID
- 8740804703389749002
- Author
- Tormen M
- Carpentiero A
- Ferrari E
- Cojoc D
- Di Fabrizio E
- Publication year
- Publication venue
- Nanotechnology
External Links
Snippet
We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D …
- 238000004519 manufacturing process 0 title abstract description 17
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