Nothing Special   »   [go: up one dir, main page]

De Lozanne et al., 1989 - Google Patents

Properties of Y-Ba-Cu-O Thin Films Grown in-Situ at Low Temperatures by Co-Evaporation and Plasma Oxidation

De Lozanne et al., 1989

Document ID
8577937092231640849
Author
De Lozanne A
Berezin A
Pan S
Silver R
Ogawa E
Publication year
Publication venue
Science and Technology of Thin Film Superconductors

External Links

Snippet

We report on the synthesis and properties of thin films of Y-Ba-Cu-O grown by co- evaporation and plasma oxidation. A differential pumping scheme is used to obtain high oxygen pressure on the substrate surface, while maintaining a low pressure at the sources …
Continue reading at link.springer.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2454—Processes for depositing or forming superconductor layers characterised by the substrate
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/22—Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
    • H01L39/223—Josephson-effect devices
    • H01L39/225—Josephson-effect devices comprising high Tc ceramic materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/02—Details
    • H01L39/12—Details characterised by the material
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure

Similar Documents

Publication Publication Date Title
Silver et al. As‐deposited superconducting Y‐Ba‐Cu‐O thin films on Si, Al2O3, and SrTiO3 substrates
Scheel et al. Problems in epitaxial growth of high-Tc superconductors
US4912087A (en) Rapid thermal annealing of superconducting oxide precursor films on Si and SiO2 substrates
Berkley et al. In situ formation of superconducting YBa2Cu3O7− x thin films using pure ozone vapor oxidation
Lichtenberg et al. Sr2RuO4: A metallic substrate for the epitaxial growth of YBa2Cu3O7− δ
Naito et al. MgB2 thin films for superconducting electronics
JP3207058B2 (en) Superconductor thin film and method of manufacturing the same
EP2138611A1 (en) Polycrystalline thin film and method for producing the same and oxide superconductor
Selvamanickam et al. High-current Y-Ba-Cu-O coated conductor using metal organic chemical-vapor deposition and ion-beam-assisted deposition
US6794339B2 (en) Synthesis of YBa2CU3O7 using sub-atmospheric processing
Lu et al. Solid source MOCVD for the epitaxial growth of thin oxide films
EP0382609B1 (en) Method of manufacturing Josephson Junctions
EP0553593B1 (en) Pinning structures for superconducting films and method for making same
De Lozanne et al. Properties of Y-Ba-Cu-O Thin Films Grown in-Situ at Low Temperatures by Co-Evaporation and Plasma Oxidation
Kwo Growth and properties of high Tc films in Y1Ba2Cu3O7− x perovskite by molecular beam epitaxy
Wang et al. YBa $ _2 $ Cu $ _3 $ O $ _ {7-\delta} $-CeO $ _2 $-YBa $ _2 $ Cu $ _3 $ O $ _ {7-\delta} $ Multilayers Grown by Reactive Co-Evaporation on Sapphire Wafers
Simon et al. Improvement of average film quality in RBa/sub 2/Cu/sub 3/O/sub 7-x/sputtered films
EP0487421B1 (en) Process for preparing a thin film of Bi-type oxide superconductor
Behner et al. Characterization of sputter-deposited YBaCuO films by X-ray photoelectron spectroscopy
Gibson et al. Raman microscopy as a local probe of structural defects and oxygen content in HTS thin films
Jung et al. Improved microstructure of superconducting Y-Ba-Cu-O films deposited on LaAlO3 substrates
Piehler et al. Preparation of TlBa2Ca2Cu3O9±δ high Tc thin films by laser ablation in combination with thermal evaporation of thallium oxide
Kuppusami et al. Processing and properties of thin films of high critical temperature superconductors
Gavaler et al. Optimization of YBCO surfaces of tunnel junctions
Eom et al. Synthesis and characterization of superconducting thin films