Xiao et al., 2013 - Google Patents
Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop controlXiao et al., 2013
View PDF- Document ID
- 8472020065492403224
- Author
- Xiao D
- Su J
- Chen Z
- Hou Z
- Wang X
- Wu X
- Publication year
- Publication venue
- Journal of Micro/Nanolithography, MEMS, and MOEMS
External Links
Snippet
In order to improve its structural sensitivity, a vibratory microgyroscope is commonly sealed in high vacuum to increase the drive mode quality factor. The sense mode quality factor of the microgyroscope will also increase simultaneously after vacuum sealing, which will lead …
- 238000000034 method 0 abstract description 18
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5635—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating wires or strings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in preceding groups
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zhang et al. | Microelectromechanical resonant accelerometer designed with a high sensitivity | |
| Kou et al. | Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope | |
| Kou et al. | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package | |
| Nguyen et al. | Z-axis micromachined tuning fork gyroscope with low air damping | |
| Ruan et al. | Automatic mode-matching method for MEMS disk resonator gyroscopes based on virtual coriolis force | |
| Poletkin et al. | Modeling a pull-in instability in micro-machined hybrid contactless suspension | |
| Zhang et al. | Amplitude-modulated resonant accelerometer employing parametric pump | |
| Wang et al. | Design of a capacitive MEMS accelerometer with softened beams | |
| Xu et al. | A tuning fork gyroscope with a polygon-shaped vibration beam | |
| Xu et al. | A real-time circuit phase delay correction system for MEMS vibratory gyroscopes | |
| Wang et al. | A novel single-axis MEMS tilt sensor with a high sensitivity in the measurement range from 0∘ to 360∘ | |
| Xiao et al. | Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam | |
| Novikov et al. | The planar silicon-based microelectronic technology for electrochemical transducers | |
| Su et al. | Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness | |
| Xiao et al. | Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop control | |
| Hussein et al. | Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams | |
| Li et al. | Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope | |
| Wu et al. | Analysis of parametric and subharmonic excitation in push-pull driven disk resonator gyroscopes | |
| Hou et al. | Effect of die attachment on key dynamical parameters of micromachined gyroscopes | |
| Iqbal et al. | A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators | |
| Elsayed et al. | A novel comb architecture for enhancing the sensitivity of bulk mode gyroscopes | |
| Zhang et al. | Study of the influence of phase noise on the MEMS disk resonator gyroscope interface circuit | |
| Acernese et al. | Low frequency inertial control strategy for seismic attenuation with multi-stage mechanical suspensions | |
| Tsai et al. | Integrated model reference adaptive control and time-varying angular rate estimation for micro-machined gyroscopes | |
| Miao et al. | A novel method of quadrature compensation in the butterfly resonator based on modal stiffness analysis |