Nothing Special   »   [go: up one dir, main page]

Vignola et al., 2002 - Google Patents

Characterization of silicon micro-oscillators by scanning laser vibrometry

Vignola et al., 2002

View PDF
Document ID
8239885626845342879
Author
Vignola J
Liu X
Morse S
Houston B
Bucaro J
Marcus M
Photiadis D
Sekaric L
Publication year
Publication venue
Review of scientific instruments

External Links

Snippet

The dynamics of single-crystal silicon∼ 100 μm size rectangular paddle oscillators at room temperature have been studied using a recently developed high-resolution scanning laser vibrometer. The dynamic mechanical behavior is determined by scans of the entire device …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Similar Documents

Publication Publication Date Title
Giessibl The qPlus sensor, a powerful core for the atomic force microscope
Friedt et al. Introduction to the quartz tuning fork
Herdier et al. Laser Doppler vibrometry for evaluating the piezoelectric coefficient d33 on thin film
Liu et al. A loss mechanism study of a very high Q silicon micromechanical oscillator
Linzon et al. Efficient parametric excitation of silicon-on-insulator microcantilever beams by fringing electrostatic fields
Vignola et al. Characterization of silicon micro-oscillators by scanning laser vibrometry
Spiel et al. Normal modes of a Si (100) double-paddle oscillator
Prada et al. Influence of the anisotropy on zero-group velocity Lamb modes
Ilic et al. Theoretical and experimental investigation of optically driven nanoelectromechanical oscillators
Rittenmyer et al. Direct measurement of the temperature‐dependent piezoelectric coefficients of composite materials by laser Doppler vibrometry
Behme et al. Transverse surface acoustic wave detection by scanning acoustic force microscopy
Staruch et al. Effects of magnetic field and pressure in magnetoelastic stress reconfigurable thin film resonators
Mullin et al. Torsional resonance atomic force microscopy in water
Chao et al. Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices
US6305226B1 (en) Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators
San Paulo et al. Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes
Lipiäinen et al. Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization
Zhao et al. Piezoelectric bimorph-based scanner in the tip-scan mode for high speed atomic force microscope
Torres et al. High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
Haiberger et al. Fabrication and laser control of double-paddle silicon oscillators
Seo et al. High-speed near-field scanning optical microscopy with a quartz crystal resonator
Behme et al. Simultaneous bimodal surface acoustic-wave velocity measurement by scanning acoustic force microscopy
Metcalf et al. An ultra-high Q silicon compound cantilever resonator for Young's modulus measurements
Vignola et al. Laser Doppler method for mode identification on micro-oscillators
Oosterkamp et al. Frequency domain multiplexing of force signals with application to magnetic resonance force microscopy