Nothing Special   »   [go: up one dir, main page]

Bourim et al., 2009 - Google Patents

Creep behavior of undoped and La–Nb codoped PZT based micro-piezoactuators for micro-optical modulator applications

Bourim et al., 2009

View PDF
Document ID
8198117994201783636
Author
Bourim E
Kim H
Yang J
Yang J
Woo K
Song J
Yun S
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

Time-dependent deformation (creep) behaviors of piezoelectric microactuators have been investigated. Position (or gap height) drift of microbridged actuator beam and its displacement amplitude change with time could be attributed to the anelastic behavior of the …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/16—Selection of materials
    • H01L41/18—Selection of materials for piezo-electric or electrostrictive devices, e.g. bulk piezo-electric crystals
    • H01L41/187—Ceramic compositions, i.e. synthetic inorganic polycrystalline compounds incl. epitaxial, quasi-crystalline materials
    • H01L41/1875—Lead based oxides
    • H01L41/1876—Lead zirconate titanate based
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/31—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
    • H01L41/314—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base by depositing piezo-electric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/35—Forming piezo-electric or electrostrictive materials
    • H01L41/45—Organic materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/35—Forming piezo-electric or electrostrictive materials
    • H01L41/39—Inorganic materials
    • H01L41/43—Inorganic materials by sintering

Similar Documents

Publication Publication Date Title
Kueppers et al. PZT thin films for piezoelectric microactuator applications
JP5621922B2 (en) Piezoelectric element and manufacturing method thereof
Yeo et al. Effect of piezoelectric layer thickness and poling conditions on the performance of cantilever piezoelectric energy harvesters on Ni foils
Nguyen et al. Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates
Nguyen et al. Controlling piezoelectric responses in Pb (Zr0. 52Ti0. 48) O3 films through deposition conditions and nanosheet buffer layers on glass
Copie et al. Adsorbate screening of surface charge of microscopic ferroelectric domains in sol–gel PbZr0. 2ti0. 8o3 thin films
US9620703B2 (en) Piezoelectric thin-film element, piezoelectric sensor and vibration generator
Bourim et al. Creep behavior of undoped and La–Nb codoped PZT based micro-piezoactuators for micro-optical modulator applications
Hong et al. Residual stress development in Pb (Zr, Ti) O3/ZrO2/SiO2 stacks for piezoelectric microactuators
Dutta et al. Ferroelectric and Piezoelectric properties of (111) oriented lanthanum modified lead zirconate titanate film
Yin et al. Preparation and characterization of unimorph actuators based on piezoelectric Pb (Zr0. 52Ti0. 48) O3 materials
Abergel et al. Optimized gradient-free PZT thin films for micro-actuators
Xiong et al. Piezoelectric properties of PZT films prepared by the sol–gel method and their application in MEMS
Peters et al. Thermal stress accommodation in dip cast lead zirconate‐titanate ferroelectric films on flexible substrates
Kanda et al. Fabrication and characterization of double-layer Pb (Zr, Ti) O3 thin films for micro-electromechanical systems
Osone et al. Ferroelectric and piezoelectric properties of Pb (ZrxTi1− x) O3 thick films prepared by chemical solution deposition process
Le Rhun et al. Transparent PZT MIM capacitors on glass for piezoelectric transducer applications
Cueff et al. Influence of the crystallographic orientation of Pb (Zr, Ti) O 3 films on the transverse piezoelectric coefficient d 31
Plihon et al. Printed actuators made with electroactive polymers on flexible substrates
Lu et al. Preparation and characterization of wafer scale lead zirconate titanate film for MEMS application
Pan et al. Domain growth dynamics in PMN-PT ferroelectric thin films
Ferri et al. Ion‐Beam Etching on Nanostructured La 2 Ti 2 O 7 Piezoelectric Thin Films
Maiwa et al. Electrical and electromechanical properties of PbZrO3 thin films prepared by chemical solution deposition
Wague et al. Effects of hot poling treatment on properties and behavior of PZT based piezoelectric actuators
Weaver et al. Electromechanical coupling and temperature-dependent polarization reversal in piezoelectric ceramics