Tabib-Azar et al., 1999 - Google Patents
Nondestructive superresolution imaging of defects and nonuniformities in metals, semiconductors, dielectrics, composites, and plants using evanescent microwavesTabib-Azar et al., 1999
View PDF- Document ID
- 7560624876030929621
- Author
- Tabib-Azar M
- Pathak P
- Ponchak G
- LeClair S
- Publication year
- Publication venue
- Review of Scientific Instruments
External Links
Snippet
Evanescent fields have been used to resolve features smaller than the classical Abbé limit. Both evanescent optical waves and microwaves have been used in high-resolution imaging to resolve features several times smaller than the wavelength of radiation. 1–10 We have …
- 238000003384 imaging method 0 title abstract description 16
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
- G01R33/28—Details of apparatus provided for in groups G01R33/44 - G01R33/64
- G01R33/32—Excitation or detection systems, e.g. using radio frequency signals
- G01R33/34—Constructional details, e.g. resonators, specially adapted to MR
- G01R33/34015—Temperature-controlled RF coils
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Tabib-Azar et al. | Nondestructive superresolution imaging of defects and nonuniformities in metals, semiconductors, dielectrics, composites, and plants using evanescent microwaves | |
| Tabib-Azar et al. | 0.4 μm spatial resolution with 1 GHz (λ= 30 cm) evanescent microwave probe | |
| Gao et al. | Quantitative microwave near-field microscopy of dielectric properties | |
| US6173604B1 (en) | Scanning evanescent electro-magnetic microscope | |
| Tabib-Azar et al. | Non-destructive characterization of materials by evanescent microwaves | |
| Park et al. | Microwave dielectric properties of tunable capacitors employing bismuth zinc niobate thin films | |
| Golosovsky et al. | High-spatial resolution resistivity mapping of large-area YBCO films by a near-field millimeter-wave microscope | |
| Xiang et al. | Quantitative complex electrical impedance microscopy by scanning evanescent microwave microscope | |
| Tselev et al. | Broadband dielectric microwave microscopy on micron length scales | |
| Kleismit et al. | Sensitivity and resolution of evanescent microwave microscope | |
| Buchter et al. | Scanning microwave microscopy applied to semiconducting GaAs structures | |
| US9075081B2 (en) | Method and means for coupling high-frequency energy to and/or from the nanoscale junction of an electrically-conductive tip with a semiconductor | |
| US7501833B2 (en) | Evanescent microwave microscopy probe and methodology | |
| Hong et al. | Improved surface imaging with a near-field scanning microwave microscope using a tunable resonator | |
| Tabib-Azar et al. | Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope | |
| JP4431273B2 (en) | Scanning evanescent electromagnetic microscope | |
| Zhuravel et al. | Effect of LaAlO3 twin-domain topology on local dc and microwave properties of cuprate films | |
| Ma et al. | The distribution measurement of the photo-induced plasma in semiconductor by near-field scanning microwave microscopy | |
| Hu et al. | Imaging of microwave intermodulation fields in a superconducting microstrip resonator | |
| Wang et al. | Calibration methods of a 2GHz evanescent microwave magnetic probe for noncontact and nondestructive metal characterization for corrosion, defects, conductivity, and thickness nonuniformities | |
| Chisum et al. | Planar circuits for non-contact near-field microwave probing | |
| Bergmann et al. | Measuring the permittivity of fused silica with planar on-wafer structures up to 325 GHz | |
| Zhang et al. | High frequency dielectric properties distribution of BiFeO3 thin film using near-field microwave microscopy | |
| Tabib-Azar et al. | Self-oscillating evanescent microwave probes for nondestructive evaluations of materials | |
| Ponchak et al. | Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials |