Boeshore, 2006 - Google Patents
Aluminum nitride thin films on titanium: Piezoelectric transduction on a metal substrateBoeshore, 2006
- Document ID
- 7501877545299840543
- Author
- Boeshore S
- Publication year
External Links
Snippet
With many microsystems recently fabricated on titanium substrates---mechanical arrays, sensing elements, and fluidic devices---titanium has emerged as a platform for MEMS fabrication. The success of these devices relies upon the advantageous material properties …
- 239000010936 titanium 0 title abstract description 185
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
- H01L41/31—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
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