Hamdi et al., 2014 - Google Patents
Low temperature irreversible poly (DiMethyl) Siloxane packaging of silanized SU8 microchannels: Characterization and lab-on-chip applicationHamdi et al., 2014
- Document ID
- 7446015637318861831
- Author
- Hamdi F
- Woytasik M
- Couty M
- Français O
- Le Pioufle B
- Dufour-Gergam E
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
In this paper, we describe and characterize a novel method, based on silanization, for strong bonding of SU8 microchannels to poly (dimethyl) siloxane (PDMS) flexible covers. First, the SU8 surface treatment process (silanization) is characterized through atomic force …
- 229920001486 SU-8 photoresist 0 title abstract description 70
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated micro-fluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated micro-fluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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