Papenheim et al., 2016 - Google Patents
Reducing the risk of failure with flexible composite stampsPapenheim et al., 2016
- Document ID
- 7425100782277180215
- Author
- Papenheim M
- Eidemüller W
- Wang S
- Steinberg C
- Scheer H
- Publication year
- Publication venue
- Microelectronic Engineering
External Links
Snippet
Flexible composite stamps are interesting for thermal nanoimprint as well as for UV-assisted nanoimprint as they provide conformal contact to a substrate without the need of applying high pressure. However, they are also prone to bending when handled during mounting …
- 239000002131 composite material 0 title abstract description 55
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Exposure apparatus for microlithography
- G03F7/70216—Systems for imaging mask onto workpiece
- G03F7/70258—Projection system adjustment, alignment during assembly of projection system
- G03F7/70266—Adaptive optics, e.g. deformable optical elements for wavefront control
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