Lenz, 2015 - Google Patents
Smart feature selection to enable advanced virtual metrologyLenz, 2015
View PDF- Document ID
- 4160470891776439393
- Author
- Lenz B
- Publication year
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Snippet
The present dissertation enhances the research in computer science, especially state of the art Machine Learning (ML), in the field of process development in Semiconductor Manufacturing (SM) by the invention of a new Feature Selection (FS) algorithm to discover …
- 238000000034 method 0 abstract description 359
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING; COUNTING
- G06N—COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N99/00—Subject matter not provided for in other groups of this subclass
- G06N99/005—Learning machines, i.e. computer in which a programme is changed according to experience gained by the machine itself during a complete run
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- G—PHYSICS
- G06—COMPUTING; CALCULATING; COUNTING
- G06N—COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computer systems based on biological models
- G06N3/12—Computer systems based on biological models using genetic models
- G06N3/126—Genetic algorithms, i.e. information processing using digital simulations of the genetic system
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