Studies on contact resistance in graphene based devices
Contact resistance is an important limiting factor for the on-state current of graphene based devices. In this paper, both transmission line method and four-probe method are applied to measure the contact resistance in graphene-metal (Cr/Au and Ti/Au) ...
Development and evaluation of a Venus flytrap-inspired microrobot
Nature has provided the inspiration for many robots, leading to the development of biomimetic machines based on stick insects, jellyfish, butterflies, lobsters, and inchworms. Some carnivorous plants are capable of rapid motion, including mimosa, Venus ...
Silicon micro-cantilever chemical sensors fabricated in double-layer silicon-on-insulator (SOI) wafer
Micro-cantilever piezoresistive sensors are optimally designed and fabricated in a double-layer silicon-on-insulator (SOI) wafer. The sensor geometry is optimized by placing the sensing piezoresistor at the cantilever root region to increase effective ...
Mixed frequency excitation of an electrostatically actuated resonator
We investigate experimentally and theoretically the dynamics of a capacitive resonator under mixed frequency excitation of two AC harmonic signals. The resonator is composed of a proof mass suspended by two cantilever beams. Experimental measurements ...
A piezoelectric inertia rotary actuator based on asymmetric clamping mechanism
A newly piezoelectric inertia rotary actuator is presented by using asymmetric mechanical structure to produce asymmetric inertia impact force when the symmetric electrical signal is applied to the piezoelectric bimorph Mechanical analysis was derived ...
Novel combined through-wafer-groove fabrication approach and its application in wafer level packaging of GaAs CCD
This paper presents a novel combined through-wafer-groove fabrication approach, which is applied to the wafer level packaging (WLP) of GaAs charge coupled devices (CCD) for electrical interconnection. The combined methodology includes mechanical dicing ...
Microinjection moulding of miniaturised polymeric ortho-planar springs
Microinjection moulding is an essential technology for mass production of components with micro-features. In addition, it can integrate multiple parts into a single piece, thus reducing the number of parts and removing assembly processes. An ortho-...
Modelling and simulation of forming process of the lithographically fabricated out-of-plane microlens using a cellular automata method
Three dimensional (3D) cellular automata (CA) model has been successfully applied in photoresist etching simulation in recent years. In this paper, a simplified 3D CA model is used to simulate the etching process of out-of-plane microlens fabricated on ...
Microfabrication of a dual-mode rectangular waveguide filter
This paper reports the design and microfabrication of an F-band rectangular waveguide filter. The filter was designed to have a double-cavity structure to achieve dual-mode filtering. The filter was modeled and simulated using the commercial software, ...
Analysis of intrinsic damping in vibrating piezoelectric microcantilevers
The intrinsic damping of a piezoelectric microcantilever is studied under high vacuum conditions, where the influence of fluid damping on the quality factor is negligible. This paper investigates three major intrinsic damping effects, which are anchor ...
A flexible dry electrode based on APTES-anchored PDMS substrate for portable ECG acquisition system
We developed a simple and low-cost flexible dry electrode with micro domes by depositing metal film directly on (3-aminopropyl)triethoxysilane (APTES)-anchored polydimethylsiloxane (PDMS) substrate for portable electrocardiogram (ECG) acquisition ...
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes
A MEMS inertial switch with flexible electrodes to contact-enhanced is designed and fabricated. ANSYS software is used to simulate the displacement of the mass, deformation of the flexible electrode and contact time of the switch. A high-speed video ...
Novel in-line WAT processing of 55 nm CIS product and effect of process waiting time on void growth at interface of SiCN with copper capping layer
The WAT (wafer acceptance test) is the last examination that is performed before a wafer or a chip fab out to ensure the quality and stability of chip performance. In 55 nm CIS (CMOS Image Sensor) technology, a highly smooth wafer surface is critical ...
Preliminary mechanical analysis of an improved amphibious spherical father robot
Amphibious micro-robots are being developed for complicated missions in limited spaces found in complex underwater environments. Therefore, compact structures able to perform multiple functions are required. The robots must have high velocities, long ...
A microfluidic system for liquid colour-changing glasses with shutter shade effect
In order to comfort and protect human eyes in an environment with strong lights by using colour-changing glasses, a microfluidic system for liquid colour-changing glasses with shutter shade effect is developed in this paper. The colour-changing layer of ...
On-chip whole blood plasma separator based on microfiltration, sedimentation and wetting contrast
- Sanghoon Park,
- Roxana Shabani,
- Mark Schumacher,
- Yoon-Seoung Kim,
- Young Min Bae,
- Kyeong-Hee Lee,
- Hyoung Jin Cho
Miniaturized on-chip blood separators have a great value for point-of-care diagnosis. In our work, a combined design strategy--microfiltration, sedimentation in a retarded flow, and wetting contrast--was taken to overcome the known limitations of on-...
Effect of mold stiffness on surface flatness of mold-pressed glass
This paper presents the effect of mold stiffness on the surface flatness of mold-pressed glass for glass molding and imprint processes. Phosphate and borosilicate glasses were pressed at their viscoelastic temperature region using flat molds of several ...
Characterization of a novel antibody immobilization combining protein G with parylene-H for surface plasmon resonance immunosensors
Here we present a method for selectively and efficiently immobilizing antibodies to enhance the detection performance of surface plasmon resonance immune-sensors (SPRIs) for diagnostic applications. To improve the performance of antibody arrays, protein ...
Ultrahigh precision low-cost pinpointed SiO2 patterns nanofabrication by using traditional MEMS fabrication processes
Recent years, nanoscale patterns transfer technique from DNA origami molecules to SiO2 layer has been a promising approach of silicon based nanofabrication process. However, researchers find it difficult to locate SiO2 nano patterns with origami's ...
Micromolding fabrication of microresistors with a composite of carbon nanotubes and SU-8 polymer and the application in Wilkinson power divider
This paper reports a new method to fabricate microresistors for applications in micro-electromechanical systems. The fabrication is based on ultraviolet (UV) lithography and micromolding replication. A master mold was first made using UV lithography of ...
Layered axial force coupled membrane based metal contact single-pole quad-throw RF MEMS switch: design, RF performance and mechanical modeling
RF MEMS is a perfect candidate to replace the conventional switches used for microwave frequency. Most of the RF MEMS switches developed generally concentrate on single-pole single-throw based configurations and limited work is reported on switches ...
Thermomechanical behavior of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation
Shape-memory-alloy (SMA) has attracted considerable attention in recent years as a smart and efficient material, due to its unique properties. SMA microactuators became one of the potential solutions for unresolved issues in microelectromechanical ...
Optimization for etching shallow ridge and trench profiles on silicon based on continuous etching process in ICPRIE system
In order to directly characterize sidewall roughnesses of shallow microstructures with etching depth less than 10 μm using a conventional atomic force microscope tip, an easy bevel-cut sample technique was developed. With help of the proposed ...
Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application
In this paper, we design and analysis a new RF MEMS switched capacitor that exhibits low pull in voltage. We propose a capacitance calculation method based on conformal mapping for the coupled open-ends in coplanar waveguide (CPW), an inductance ...
Study on breakdown to nano TFT loaded by GPa order mechanical stress
A nano-film transistor test structure, simulating nano Air-gap thin film transistor (TFT), is developed to study TFT's breakdown when it vibrates at high temperature. To achieve point-wise linear GPa mechanical stress (MS), in situ detection of probe ...