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Runtime Abstraction-Level Conversion of Discrete-Event Wafer-fabrication Models for Simulation Acceleration

Published: 15 June 2020 Publication History

Abstract

Speeding up the simulation of discrete-event wafer fab models is essential because optimizing the scheduling and dispatching policies under various circumstances requires repeated evaluation of the decision candidates during parameter-space exploration. In this paper, we present a runtime abstraction-level conversion approach for discrete-event wafer-fabrication (wafer-fab) models to gain simulation speedup. During the simulation, if a machine group of the wafer fab models reaches a steady state, then the proposed approach attempts to substitute this group model with a mean-delay model (MDM) as a high abstraction level model. The MDM abstracts the detailed operations of the group's sub-component models into an average delay based on the queueing modeling, which can guarantee acceptable accuracy under steady state. The proposed abstraction-level converter (ALC) observes the queueing parameters of low-level groups to identify the convergence of each group's work-in-progress (WIP) level through a statistical test. When a group's WIP level is converged, the output-to-input couplings between the models are revised to change a wafer-lot process flow from the low-level group to a mean-delay model. When the ALC detects a divergence caused by a re-entrant flow or a machine-down, the high-level model is switched back to its corresponding low-level group model. The ALC then generates dummy wafer-lot events to synchronize the busyness of high-level steady state. The proposed method was applied to case studies of wafer-fab systems and achieves simulation speedup from 6.1 to 11.8 times with corresponding 2.5 to 5.9% degradation inaccuracy.

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      cover image ACM Conferences
      SIGSIM-PADS '20: Proceedings of the 2020 ACM SIGSIM Conference on Principles of Advanced Discrete Simulation
      June 2020
      204 pages
      ISBN:9781450375924
      DOI:10.1145/3384441
      Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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      Published: 15 June 2020

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      Author Tags

      1. abstraction-level conversion
      2. discrete-event modeling
      3. multi-level simulation
      4. wafer fabrication

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      • Agency for Science Technology and Research (A*STAR) Singapore

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      Overall Acceptance Rate 398 of 779 submissions, 51%

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      View all
      • (2024)Hyperparameter Tuning with Gaussian Processes for Optimal Abstraction Control in Simulation-based Optimization of Smart Semiconductor Manufacturing SystemsACM Transactions on Modeling and Computer Simulation10.1145/364654935:1(1-21)Online publication date: 25-Nov-2024
      • (2024)Generating TCN Models From Parallel Devs Models: Semiconductor Manufacturing Systems2024 Winter Simulation Conference (WSC)10.1109/WSC63780.2024.10838759(2265-2276)Online publication date: 15-Dec-2024
      • (2023)Petri Net-Based Multi-Module Optimization Scheduling Strategy for Combinatorial EquipmentProceedings of the 2023 International Conference on Intelligent Computing and Its Emerging Applications10.1145/3659154.3659176(90-95)Online publication date: 14-Dec-2023
      • (2023)Automatic Model Generation and Data Assimilation Framework for Cyber-Physical Production SystemsProceedings of the 2023 ACM SIGSIM Conference on Principles of Advanced Discrete Simulation10.1145/3573900.3591112(73-83)Online publication date: 21-Jun-2023
      • (2023)Transforming Discrete Event Models To Machine Learning Models2023 Winter Simulation Conference (WSC)10.1109/WSC60868.2023.10407348(2662-2673)Online publication date: 10-Dec-2023
      • (2022)Hyperparameter Tunning in Simulation-based Optimization for Adaptive Digital-Twin Abstraction Control of Smart Manufacturing SystemProceedings of the 2022 ACM SIGSIM Conference on Principles of Advanced Discrete Simulation10.1145/3518997.3531024(61-68)Online publication date: 8-Jun-2022
      • (2021)Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor ManufacturingIEEE Access10.1109/ACCESS.2021.30736189(71145-71158)Online publication date: 2021
      • (2020)Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor ManufacturingIEEE Access10.1109/ACCESS.2020.30222758(165247-165262)Online publication date: 2020
      • (undefined)Industrial Internet-of-Things Sensor Simulator for Wafer Fabrication Cyber-Physical Production SystemsSSRN Electronic Journal10.2139/ssrn.4072423

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