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Pyrolysis of 1,1 dimethylhydrazine for OMVPE growth

Published: 01 August 1999 Publication History

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Published In

cover image Journal of Electronic Materials
Journal of Electronic Materials  Volume 28, Issue 8
Aug. 1999
63 pages
ISSN:0361-5235
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The Metals, Minerals, and Materials Society

United States

Publication History

Published: 01 August 1999

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  1. GaN
  2. OMVPE
  3. dimethylhydrazine
  4. pyrolysis

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