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Methods and Tools for the Design of Electrostatic Micromotors

Authors:

Tb. Johansson,

K. Hameyer,

R. BelmansAuthors Info & Claims

EDTC '96: Proceedings of the 1996 European conference on Design and Test

Page 618

Published: 11 March 1996 Publication History

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Abstract

In this paper the methodology of the design of electrostatic micromotors is discussed. Field computation is performed by the finite element method (FEM). Automated modelling and evaluation of the quantities of the electrostatic field in combination with an equivalent circuit technique leads to an efficient design tool.

References

[1]

{1} G. Engelman, O. Ehrmann, R. Leutenbauer, H. Schmitz and H. Reichl, "Fabrication of Perfectly Three-Dimensional Micro Structures by UV Depth Lithography", Proc. Optics Québec 1993, SPIE 2045, pp. 306-313.

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[2]

{2} H. Ziad, S. Spirkovitch, N. Miln, U. Beerscwinger, S. Rigo, "Pneumatic stabilization of top drive micromotors", Micro System Technology '94, October 1994, Berlin, pp. 961-967.

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[3]

{3} TB. Johansson, K. Hameyer, R. Belmans, "Equivalent Circuit Technique for Electrostatic Micromotors", ISEF '95, Thessaloniki, Greece, 25-27 September, 1995, pp. 217-220.

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Methods and Tools for the Design of Electrostatic Micromotors

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Published In

EDTC '96: Proceedings of the 1996 European conference on Design and Test

March 1996

585 pages

ISBN:0818674237

Publisher

IEEE Computer Society

United States

Publication History

Published: 11 March 1996

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EDTC96

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SIGDA

EDTC96: European Design and Test Conference

March 11 - 14, 1996

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