research-article

Aggregate modeling of semiconductor equipment using effective process times

Authors:

L. F. P. Etman,

C. P. L. Veeger,

I. J. B. F. Adan,

J. E. RoodaAuthors Info & Claims

WSC '11: Proceedings of the Winter Simulation Conference

Pages 1795 - 1807

Published: 11 December 2011 Publication History

Abstract

Performance evaluation using queueing models is common practice in semiconductor manufacturing. Analytical closed-form expressions and simulation models are popular in capacity planning and the analysis of equipment configurations. However, the complexity of semiconductor processes complicates the modeling of the equipment. Analytical models lack the required accuracy, whereas simulation models require too many details, making them impractical. Aggregation is a way to overcome this difficulty. The various details are not modeled in detail, but their contribution is lumped in the aggregate model, which makes the model more appropriate for both analysis and simulation.

This paper gives an overview of our efforts to develop a top-down aggregate modeling approach for semiconductor equipment, starting from the effective process time concept inspired by the Factory Physics book of Hopp and Spearman. The strong feature of our modeling approach is that the aggregate model parameters are estimated directly from industrial data (arrival and departure times), without the need to quantify the various details.

References

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Digital Library

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Kock, A. A. A., L. F. P. Etman, J. E. Rooda, I. J. B. F. Adan, M. van Vuuren, and A. Wierman. 2008. "Aggregate Modeling of Multi-Processing Workstations". Technical Report 2008-032, Eurandom, Eindhoven University of Technology, Eindhoven, The Netherlands. Accessed Oct. 16, 2011. http://www.eurandom.tue.nl/reports.

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Cited By

Dequeant KVialletelle PLemaire PEspinouse MHuschka TChick S(2016)A literature review on variability in semiconductor manufacturingProceedings of the 2016 Winter Simulation Conference10.5555/3042094.3042419(2598-2609)Online publication date: 11-Dec-2016
https://dl.acm.org/doi/10.5555/3042094.3042419
Wilschut TAdan IStokkermans JBuckley SMiller J(2014)Big data in daily manufacturing operationsProceedings of the 2014 Winter Simulation Conference10.5555/2693848.2694145(2364-2375)Online publication date: 7-Dec-2014
https://dl.acm.org/doi/10.5555/2693848.2694145
Jansen FEtman LRooda JAdan IRose OUhrmacher A(2012)Aggregate simulation modeling of an MRI department using effective process timesProceedings of the Winter Simulation Conference10.5555/2429759.2429867(1-12)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429867

Index Terms

Aggregate modeling of semiconductor equipment using effective process times
1. Computing methodologies
  1. Modeling and simulation
    1. Model development and analysis
      1. Model verification and validation

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cover image ACM Conferences

WSC '11: Proceedings of the Winter Simulation Conference

December 2011

4336 pages

Sponsors

IIE: Institute of Industrial Engineers
INFORMS-SIM: Institute for Operations Research and the Management Sciences: Simulation Society
SCS: Shanghai Computer Society
SIGSIM: ACM Special Interest Group on Simulation and Modeling

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Winter Simulation Conference

Publication History

Published: 11 December 2011

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WSC'11

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IIE
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WSC'11: Winter Simulation Conference 2011

December 11 - 14, 2011

Arizona, Phoenix

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WSC '11 Paper Acceptance Rate 203 of 270 submissions, 75%;

Overall Acceptance Rate 3,413 of 5,075 submissions, 67%

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Cited By

Dequeant KVialletelle PLemaire PEspinouse MHuschka TChick S(2016)A literature review on variability in semiconductor manufacturingProceedings of the 2016 Winter Simulation Conference10.5555/3042094.3042419(2598-2609)Online publication date: 11-Dec-2016
https://dl.acm.org/doi/10.5555/3042094.3042419
Wilschut TAdan IStokkermans JBuckley SMiller J(2014)Big data in daily manufacturing operationsProceedings of the 2014 Winter Simulation Conference10.5555/2693848.2694145(2364-2375)Online publication date: 7-Dec-2014
https://dl.acm.org/doi/10.5555/2693848.2694145
Jansen FEtman LRooda JAdan IRose OUhrmacher A(2012)Aggregate simulation modeling of an MRI department using effective process timesProceedings of the Winter Simulation Conference10.5555/2429759.2429867(1-12)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429867

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