Optical Slot-Waveguide Based Biochemical Sensors
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<p>(a) Schematic view of a slot-waveguide. (b) Calculated E<sub>x</sub> profile of the quasi-TE eigenmode in a Si (n<sub>H</sub> = 3.45)/SiO<sub>2</sub> (n<sub>S</sub> = n<sub>C</sub> = 1.44) slot-waveguide at a wavelength of 1.55 μm. E-field is enhanced in the nanoscale slot-region of refractive index n<sub>S</sub>.</p> ">
<p>(a) Left: Top view photograph of a 70-μm-radius Si<sub>3</sub>N<sub>4</sub> slot-waveguide microring resonator. Right: Scanning electron microscope image of the coupling region. (b) Schematic top view. (c) Schematic cross-section along the dotted line [Figure 2(b)].</p> ">
<p>Resonance wavelength of the Si<sub>3</sub>N<sub>4</sub> slot-waveguide ring resonator as a function of the bulk (top cladding) refractive index variation. Black dots: experimental data (water-ethanol solutions) [<a href="#b12-sensors-09-04751" class="html-bibr">12</a>]; red line: finite element method (FEM) based calculations [<a href="#b18-sensors-09-04751" class="html-bibr">18</a>].</p> ">
<p>Schematic cross-sections of the ring slot-waveguide for (a) HF surface etching and (b) adlayer surface sensing [<a href="#b18-sensors-09-04751" class="html-bibr">18</a>]. w<sub>r1</sub>, w<sub>r2</sub>, w<sub>slot</sub>, h, and p are the initial device dimensions (before HF etching). e<sub>SiN</sub> and e<sub>SiO</sub> are the HF etching depths in Si<sub>3</sub>N<sub>4</sub> and SiO<sub>2</sub>, respectively, and t is the adlayer thickness.</p> ">
<p>Resonance wavelength shift of a 70-μm-radius Si<sub>3</sub>N<sub>4</sub> slot-waveguide ring resonator as a function of hepatitis B surface antigen (HBsAg) concentration [<a href="#b20-sensors-09-04751" class="html-bibr">20</a>]. Square dots: experimental data; red line: sigmoidal fit.</p> ">
<p>Confocal microscope intensity profiles of a Si<sub>3</sub>N<sub>4</sub> slot-waveguide before isopropanol droplet deposition (blue line) and after isopropanol droplet evaporation (red line). Intensity profiles were taken along the dotted lines shown in the corresponding laser scanning confocal microscope images. Courtesy of M. Holgado (Centro Láser-Universidad Politécnica de Madrid).</p> ">
<p>Cross-sectional SEM image of a void nanochannel obtained by plasma-enhanced chemical vapor deposition (PECVD) of SiO<sub>2</sub> on a SOI slot-waveguide configuration. Courtesy of D. López-Romero (ISOM-Universidad Politécnica de Madrid).</p> ">
<p>Schematic top view of a directional coupler formed by slot-waveguides. Variation of the refractive index in the sensing region alters both P<sub>1</sub> and P<sub>2</sub> output powers. κ<sub>d</sub> is the coupling coefficient between the slot-waveguides.</p> ">
<p>Schematic cross-section of a multi (triple) -slot waveguide. n<sub>H</sub>, n<sub>B</sub> and n<sub>L</sub> are the refractive indexes of the rails, top cladding fluid (sensing region) and bottom cladding layer, respectively, such as n<sub>H</sub> > n<sub>B</sub>, n<sub>L</sub>.</p> ">
Abstract
:1. Introduction
2. Slot-Waveguide Based Refractometric Sensors
2.1. Silicon nitride slot-waveguide microring resonator based sensors
2.2. Silicon slot-waveguide microring resonator based sensors
2.3. Other slot-waveguide based RI sensor configurations
3. Labeling-Based Optical Slot-Waveguide Sensors
4. Opto-Mechanical Slot-Waveguide Based Sensors
5. Conclusions
Acknowledgments
References and Notes
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Barrios, C.A. Optical Slot-Waveguide Based Biochemical Sensors. Sensors 2009, 9, 4751-4765. https://doi.org/10.3390/s90604751
Barrios CA. Optical Slot-Waveguide Based Biochemical Sensors. Sensors. 2009; 9(6):4751-4765. https://doi.org/10.3390/s90604751
Chicago/Turabian StyleBarrios, Carlos Angulo. 2009. "Optical Slot-Waveguide Based Biochemical Sensors" Sensors 9, no. 6: 4751-4765. https://doi.org/10.3390/s90604751