A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
"> Figure 1
<p>(<b>a</b>) Lateral view of the out-of-plane actuator schematic. Cyan represents the substrate layer, green represents the first polysilicon layer (bottom layer), pink represents the second polysilicon layer (top layer); (<b>b</b>) Lateral view of the serpentine beams on the second polysilicon layer, A–F illustrate different segments for structural parameters.</p> "> Figure 2
<p>Schematic of generation of electrostatic repulsive force: (<b>a</b>) Arrangement of electrode and application of voltage on different electrodes to generate electrostatic repulsive force, here “V” indicate the application of a positive voltage to this electrode and “GND” means application of ground; (<b>b</b>) Simulated cross-sectional magnitude of the electrostatic field of the structure in this paper, when <span class="html-italic">V</span> = 100 Volts, based on simulation, schematic of electrical field distribution of the two central electrodes are given in <a href="#micromachines-04-00431-f002" class="html-fig">Figure 2</a>a; (<b>c</b>) Schematic of force distribution of the upper central electrode, as shown inside dashed line.</p> "> Figure 3
<p>(<b>a</b>) Arrangement of electrode and application of voltage on different electrode to generate electrostatic repulsive force in prior art presented by our group [<a href="#B14-micromachines-04-00431" class="html-bibr">14</a>,<a href="#B25-micromachines-04-00431" class="html-bibr">25</a>,<a href="#B26-micromachines-04-00431" class="html-bibr">26</a>]; (<b>b</b>) Simulated cross-sectional magnitude of the electrostatic field of the structure in a, when <span class="html-italic">V</span> = 100 Volts; Compared with <a href="#micromachines-04-00431-f003" class="html-fig">Figure 3</a>b (dashed rectangular region), electric field at the top face of central electrode in <a href="#micromachines-04-00431-f002" class="html-fig">Figure 2</a>b is larger, resulting in a larger electrostatic repulsive force.</p> "> Figure 4
<p>Schematic of the electrostatic attractive mode (cross-sectional view, only the three pairs of electrode in the center is shown); here “V” indicates the application of a positive voltage to this electrode, “GND” means application of ground, and N/A indicates electrode floating.</p> "> Figure 5
<p>(<b>a</b>) Simulation results of displacement <span class="html-italic">versus</span> length of electrodes; (<b>b</b>) Simulation results of displacement <span class="html-italic">versus</span> width of electrodes; (<b>c</b>) Simulation results of displacement <span class="html-italic">versus</span> distance between electrodes; (<b>d</b>) Simulation results of displacement <span class="html-italic">versus</span> gap between upper and lower electrodes.</p> "> Figure 6
<p>Fabrication process of the bi-directional out-of-plane actuator.</p> "> Figure 7
<p>SEM image of the prototype, electron gun voltage was set to be 20 kV, and amplification factor was 100×.</p> "> Figure 8
<p>Test result of out-of-plane displacement <span class="html-italic">versus</span> voltage in the electrostatic repulsive mode.</p> "> Figure 9
<p>(<b>a</b>) Surface profile of the actuator when no voltage is applied; (<b>b</b>) Surface profile of the actuator when a voltage of 130 V is applied in electrostatic repulsive mode.</p> "> Figure 10
<p>Test results of out-of-plane displacement <span class="html-italic">versus</span> voltage in the electrostatic attractive mode.</p> "> Figure 11
<p>Surface profile of the actuator when a voltage of 15 V is applied in electrostatic attractive mode.</p> ">
Abstract
:1. Introduction
2. Structure and Operation Principle
2.1. Structure of a Novel Bi-Directional Out-of-Plane Actuator
2.2. Operation Principle
2.2.1. Electrostatic Repulsive Mode
2.2.2. Electrostatic Attractive Mode
3. Characteristics of the Actuator
3.1. The Length of Electrodes
3.2. The Width of Electrodes
3.3. The Distance between Electrodes
3.4. Gap between Upper and Lower Electrodes
4. Fabrication and Test
Description | Symbol | Parameter |
---|---|---|
Length of electrode | L | 400 |
Width of electrode | w | 200 |
Gap between electrodes | g | 2 |
Distance between electrodes | d | 20 |
Serpentine beam segment | A | 14 |
Serpentine beam segment | B | 19 |
Serpentine beam segment | C | 16 |
Serpentine beam segment | D | 38 |
Serpentine beam segment | E | 20 |
Serpentine beam segment | F | 12 |
5. Conclusions
Acknowledgments
Conflicts of Interest
References
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Ren, H.; Wang, W.; Tao, F.; Yao, J. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines 2013, 4, 431-443. https://doi.org/10.3390/mi4040431
Ren H, Wang W, Tao F, Yao J. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines. 2013; 4(4):431-443. https://doi.org/10.3390/mi4040431
Chicago/Turabian StyleRen, Hao, Weimin Wang, Fenggang Tao, and Jun Yao. 2013. "A Bi-Directional Out-of-Plane Actuator by Electrostatic Force" Micromachines 4, no. 4: 431-443. https://doi.org/10.3390/mi4040431