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Reverse-order source/drain formation with double offset spacer (RODOS) for CMOS low-power, high-speed and low-noise amplifiers

Published: 25 August 2003 Publication History

Abstract

RODOS (Reverse-Order source/drain formation with Double Offset Spacer) was proposed for low-power, high-speed and low-noise amplifiers. Relying on simulation data, we confirmed the high feasibility of the RODOS process. It showed improved performance in linearity (VIP3). Additionally, by optimizing process parameters, we achieved small gate delay (CV/I) and low static/dynamic power consumption. It satisfied most of the requirements of LOP and LSTP in ITRS 2002. Finally, it is found out that the devices with the RODOS structure can be a promising alternative to implement low-power, high-speed and low-noise amplifiers for radio on a chip.

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  1. Reverse-order source/drain formation with double offset spacer (RODOS) for CMOS low-power, high-speed and low-noise amplifiers

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    cover image ACM Conferences
    ISLPED '03: Proceedings of the 2003 international symposium on Low power electronics and design
    August 2003
    502 pages
    ISBN:158113682X
    DOI:10.1145/871506
    Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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    Publication History

    Published: 25 August 2003

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    Author Tags

    1. RODOS
    2. amplifier
    3. high-speed
    4. low-noise
    5. low-power
    6. offset spacer
    7. reverse-order

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    ISLPED '03 Paper Acceptance Rate 90 of 221 submissions, 41%;
    Overall Acceptance Rate 398 of 1,159 submissions, 34%

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