Building interactive systems using unconventional electronics
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- Building interactive systems using unconventional electronics
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Releasing large-area SU-8 structures without using any sacrificial layers
AbstractThe wet etching and physical stripping methods are typical methods to release independent SU-8 structures. However, it is difficult to release SU-8 structures by chemically etching sacrificial layers under the large footprint area especially, ...
Graphical abstractMethods of releasing the large-area structures. (a) Preparation of SU-8 thin structures. (b) Exposure. (c-1) Peeling off the thin structures by using a razor blade. (c-2) Spin-coating of another thick SU-8 layer. (d) Exposure. (e) ...
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- General Chairs:
- Mark D. Gross,
- Nuno Jardim Nunes,
- Program Chairs:
- Ellen Yi-Luen Do,
- Stephen Brewster,
- Ian Oakley
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Association for Computing Machinery
New York, NY, United States
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