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"A Cluster-Based Method for Quantitative Characterization and Uncertainty ..."

Chen Wang et al. (2022)

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DOI: 10.1109/TIM.2022.3205662

access: closed

type: Journal Article

metadata version: 2022-10-18

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Chen Wang, Xianyu Meng, Grzegorz Królczyk, Heming Wei:
A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology. IEEE Trans. Instrum. Meas. 71: 1-9 (2022)

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