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"Analysis of Backward Sequence for Single-Armed Cluster Tools With ..."

Jun-Ho Lee, Hyun-Jung Kim (2020)

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DOI: 10.1109/TASE.2020.3002560

access: closed

type: Journal Article

metadata version: 2021-09-16

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Jun-Ho Lee, Hyun-Jung Kim:
Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations. IEEE Trans Autom. Sci. Eng. 17(4): 2167-2174 (2020)

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