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"Atomic layer epitaxy of III-V compounds: chemistry and applications."

Akira Usui (1992)

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DOI: 10.1109/5.168671

access: closed

type: Journal Article

metadata version: 2022-06-16

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Akira Usui:
Atomic layer epitaxy of III-V compounds: chemistry and applications. Proc. IEEE 80(10): 1641-1653 (1992)

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