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"Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating ..."

Chang Ge, Edmond Cretu (2022)

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DOI: 10.3390/S22082994

access: open

type: Journal Article

metadata version: 2022-04-27

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Chang Ge, Edmond Cretu:
Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors. Sensors 22(8): 2994 (2022)

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