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"An effective system for parameter optimization in photolithography process ..."

Wen-Chin Chen et al. (2014)

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DOI: 10.1007/S00521-013-1353-7

access: closed

type: Journal Article

metadata version: 2020-09-10

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Wen-Chin Chen, Xiao-Yun Jiang, Hui-Pin Chang, Hisa-Ping Chen:
An effective system for parameter optimization in photolithography process of a LGP stamper. Neural Comput. Appl. 24(6): 1391-1401 (2014)

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