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"Automatic defect classification for semiconductor manufacturing."

Paul B. Chou et al. (1997)

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DOI: 10.1007/S001380050041

access: closed

type: Journal Article

metadata version: 2017-05-17

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  - https://dblp.org/rec/journals/mva/ChouRSWB97
Paul B. Chou, A. Ravishankar Rao, Martin C. Sturzenbecker, Frederick Y. Wu, Virginia H. Brecher:
Automatic defect classification for semiconductor manufacturing. Mach. Vis. Appl. 9(4): 201-214 (1997)

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