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"Local thickness and composition analysis of TEM lamellae in the FIB."

Christian Lang et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.043

access: closed

type: Journal Article

metadata version: 2022-10-02

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Christian Lang, Matthew Hiscock, Michael Dawson, Cheryl Hartfield:
Local thickness and composition analysis of TEM lamellae in the FIB. Microelectron. Reliab. 54(9-10): 1790-1793 (2014)

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