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"Mechanism for convex corner undercutting of (110) silicon in KOH."

Wei Dong et al. (2004)

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DOI: 10.1016/J.MEJO.2004.01.005

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/DongZLLXC04
Wei Dong, Xindong Zhang, Caixia Liu, Ming Li, Baokun Xu, Weiyou Chen:
Mechanism for convex corner undercutting of (110) silicon in KOH. Microelectron. J. 35(5): 417-419 (2004)

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