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"CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS ..."

Jose Luis Muñoz-Gamarra, Arantxa Uranga, Núria Barniol (2016)

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DOI: 10.3390/MI7020030

access: open

type: Journal Article

metadata version: 2019-06-02

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  - journals/micromachines/Munoz-GamarraUB16
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  - https://dblp.org/rec/journals/micromachines/Munoz-GamarraUB16
Jose Luis Muñoz-Gamarra, Arantxa Uranga, Núria Barniol:
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology. Micromachines 7(2): 30 (2016)

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