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"Improving automated visual fault inspection for semiconductor ..."

Tobias Schlosser et al. (2022)

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DOI: 10.1007/S10845-021-01906-9

access: open

type: Journal Article

metadata version: 2022-05-13

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  - journals/jim/SchlosserFBK22
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  - https://dblp.org/rec/journals/jim/SchlosserFBK22
Tobias Schlosser, Michael Friedrich, Frederik Beuth, Danny Kowerko:
Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks. J. Intell. Manuf. 33(4): 1099-1123 (2022)

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