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"Novel method for detection of mixed-type defect patterns in wafer maps ..."
Tae San Kim et al. (2022)
- Tae San Kim, Jong Wook Lee, Won Kyung Lee, So Young Sohn:
Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm. J. Intell. Manuf. 33(6): 1715-1724 (2022)
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