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"Fault Detection Prediction Using a Deep Belief Network-Based ..."

Jae Kwon Kim, Jong Sik Lee, Youngshin Han (2019)

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DOI: 10.1142/S0218194019400126

access: closed

type: Journal Article

metadata version: 2020-07-22

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  - journals/ijseke/KimLH19
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  - https://dblp.org/rec/journals/ijseke/KimLH19
Jae Kwon Kim, Jong Sik Lee, Youngshin Han:
Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process. Int. J. Softw. Eng. Knowl. Eng. 29(8): 1125-1139 (2019)

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