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"High UV Sensitivity of SiON Film and Its Application to Center Wavelength ..."
Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun (2005)
- Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun:
High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter. IEICE Trans. Electron. 88-C(5): 998-1004 (2005)
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