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"PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact ..."
Shun'ichiro Ohmi et al. (2016)
- Shun'ichiro Ohmi, Mengyi Chen, Xiaopeng Wu, Yasushi Masahiro:
PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact Resistivity. IEICE Trans. Electron. 99-C(5): 510-515 (2016)
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