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"Engineering Ferroelectric HZO With n+-Si/Ge Substrates ..."

Zefu Zhao et al. (2024)

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DOI: 10.1109/ACCESS.2024.3402120

access: open

type: Journal Article

metadata version: 2024-06-18

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Zefu Zhao, Yun-Wen Chen, Yu-Rui Chen, Chee Wee Liu:
Engineering Ferroelectric HZO With n⁺-Si/Ge Substrates Achieving High 2P_r=84 μC/cm² and Endurance >1E11. IEEE Access 12: 71598-71605 (2024)

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