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"Big data analytics for cycle time related feature selection in the ..."

Junliang Wang, Peng Zheng, Jie Zhang (2020)

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DOI: 10.1016/J.CIE.2020.106362

access: closed

type: Journal Article

metadata version: 2020-09-05

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Junliang Wang, Peng Zheng, Jie Zhang:
Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system. Comput. Ind. Eng. 143: 106362 (2020)

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