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"Design of virtual production lines in back-end semiconductor manufacturing ..."

Ying Tang, MengChu Zhou, Robin G. Qiu (2000)

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DOI: 10.1109/ICSMC.2000.886359

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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Ying Tang, MengChu Zhou, Robin G. Qiu:
Design of virtual production lines in back-end semiconductor manufacturing systems. SMC 2000: 1733-1738

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