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"Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride ..."
Carlo Trigona et al. (2024)
- Carlo Trigona, Suhail Ahmed Almani, Alireza Mehdi, Giuliano A. Salerno, Vincenzina Strano, Ausrine Bartasyte, Samuel Margueron, Salvatore Baglio, Quentin Micard:
Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices. ROSE 2024: 1-5
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