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"Parallel Simulation of Coupled Oxidation and Diffusion in VLSI ..."

Matthias G. Hackenberg, Wolfgang Joppich, Slobodan Mijalkovic (1997)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2013-05-26

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  dblp key:
  - conf/parco/HackenbergJM97
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  persistent URL:
  - https://dblp.org/rec/conf/parco/HackenbergJM97
Matthias G. Hackenberg, Wolfgang Joppich, Slobodan Mijalkovic:
Parallel Simulation of Coupled Oxidation and Diffusion in VLSI Wafer-Fabrication. PARCO 1997: 211-215

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