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"Modeling and Simulation of MEMS Capacitive Displacement Sensors."

Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel (2020)

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DOI: 10.1109/NEMS50311.2020.9265618

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/nems/ZikoGK20
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  - https://dblp.org/rec/conf/nems/ZikoGK20
Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel:
Modeling and Simulation of MEMS Capacitive Displacement Sensors. NEMS 2020: 171-175

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