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"A CMOS-MEMS piezoresistive accelerometer with large proof mass."

Mohammad Haris, Hongwei Qu (2010)

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DOI: 10.1109/NEMS.2010.5592224

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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  - conf/nems/HarisQ10a
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Mohammad Haris, Hongwei Qu:
A CMOS-MEMS piezoresistive accelerometer with large proof mass. NEMS 2010: 309-312

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