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"Development of high-performance parallel exposure I-line UV light source."

Po-Kai Chiu et al. (2016)

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DOI: 10.1109/NEMS.2016.7758276

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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  dblp key:
  - conf/nems/ChiuCLHWC16
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  - https://dblp.org/rec/conf/nems/ChiuCLHWC16
Po-Kai Chiu, Donyau Chiang, Chao-Te Lee, Chien-Nan Hsiao, Zheng-Han Wu, Chien-Yue Chen:
Development of high-performance parallel exposure I-line UV light source. NEMS 2016: 396-400

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