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"A design of phase-closed-loop nanomachining control based ultrasonic ..."

Jialin Shi et al. (2016)

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DOI: 10.1109/IROS.2016.7759763

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Jialin Shi, Lianqing Liu, Peng Yu, Yang Cong:
A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM. IROS 2016: 5193-5198

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