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"Research on Thermal Field Coupling Simulation of Silicon-based ..."

Tianjun Ma et al. (2024)

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DOI: 10.1109/ISOEN61239.2024.10556333

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-25

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Tianjun Ma, Na Li, Yinghao Liu, Wenjing Yue, Jianhai Sun:
Research on Thermal Field Coupling Simulation of Silicon-based Micro-hotplate CO Sensor. ISOEN 2024: 1-3

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